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Assy, Lftr, Strpr, Rev. C
Assy Lower Electrode Oxide Incl. Electrode and 4 Pin Lifter
Ring, Focus
Wdo, RF Shpd Cer, Fxd Gapn
Tylan CMHT-11S02 Baratron 0-10 TORR
Tylan CMH4-M11S19 Baratron Assy, Mnmtr, 0-100MTORR
LAM RESEARCH 810-017030-005 Assy PCB Gas Panel
KIT, PM, ANL, CHMBR, 4520, CLP SYS
Power Supply, Power One, HTAA-16W-A, Input: 100-240VAC Output: +5VDC-2A, +/-12VDC-0.4A, -5VDC-0.4A.
Ring Plate Retaining Ring Shield
Electrode Cap Electrode Lower 8"
Ring Orifice
Mass Flow Controller Horiba STEC SEC-Z512MGX 500 SCCM H2 MR.MG-04 - NORMALLY OPEN VALVE
PCB Wheel Current PCB
PCB PWBA, VAC Control, Wafer Loader Interlock
PCB PWB ION Gauge Controller
MKS i-Baratron Digital Manometer, Range 10 Torr, DeviceNet
Axcelis 555232 Analog Lamp Control Module Fusion ES3, Rev.D
Baratron Pressure Switch, 100 TORR-G
Assy, Temp Control, ES3 Eaton Fusion