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Applied Materials 0100-00011 PCB Chopper Drive
AMAT 0100-09099 PCB Chamber Interconnect P5000
AMAT 0100-00013 Gauge ION/TC AC Control
AMAT 0190-35208 Assy, PCB, MCVD Chamber Interface
AMAT 0100-00048 PCB I/O Status Monitor
LAM Research 853-130027-001 Edge Finder Assembly
Definite Purpose Contactor & Auxiliary Contact C320KGD2
Temperature Controller, Watlow Model 96A1-CDDM-00GG
LAM Research 718-092326-081 ESC Elctd, Cap, 8" ESC, Notched
LAM RESEARCH 852-017500-001 Monitor ASSY CHAS Monitor 14" GF
LAM Research 853-021917-004 Assy, Htr Paddle / Fdthru, ISO, 4"
LAM Research 853-032776-002 Assy, Lftr, Strpr, Rev. C
LAM Research 853-011632-002 Assy Lower Electrode Oxide Incl. Electrode and 4 Pin Lifter
LAM Research 716-140436-001 Ring, Focus
LAM Research 716-330121-001 Wdo, RF Shpd Cer, Fxd Gapn NEW
LAM Research 853-031457-002 Tylan CMHT-11S02 Baratron 0-10 TORR
LAM Research 853-031457-001-3-DFT Tylan CMH4-M11S19 Baratron Assy, Mnmtr, 0-100MTORR
LAM RESEARCH 810-017030-005 NEW ASSY PCB GAS PANEL
LAM RESEARCH 849-210021-001 KIT, PM, ANL, CHMBR, 4520, CLP SYS
Power Supply, Power One, HTAA-16W-A, Input: 100-240VAC Output: +5VDC-2A, +/-12VDC-0.4A, -5VDC-0.4A.