Condition: "as-is" Tool Model : AMAT Centura 200mm PECVD Process chamber Process chamber is 100% complete and was fully operational prior decommissioning Including: gas box, remote rack and all interfacing
AMAT Centura MXP chamber
Condition: "as-is" 200 mm ESC Complete including turbo and RF-match.
Axcelis Fusion ES3 12" chamber
Condition: "as-is" Tool Model : Axcelis Fusion ES3 Process chamber is 100% complete and was fully operational prior decommissioning
LAM - 2300 Exelan Flex Oxide Etch Chamber
Condition: “As is” Serial number: 23EX1090A Date of manufacture: 2005 Wafer size 300mm
TEL - Tactras RLSA Etch chamber
Condition: “As is” Serial number: CVM00025 Date of manufacture: 2012 Wafer size 300mm
TEL - Tokyo Electron LEAGA RST chamber
Condition: “As is” Serial number: PJ105 Date of manufacture: 2018 Wafer size 300mm
HITACHI M712 / M711 Alu Dry Etch Process chamber
Condition: “As is” Serial number: Date of manufacture: 2006 Wafer size 300mm
HITACHI M712 / M711 Dry Etch Strip chamber
Condition: “As is” Serial number: Date of manufacture: 2006 Wafer size 300mm
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