Non F-gas thermo-chillers

Are you aware of the new regulations?
EU regulations lead to an F-gas-free future.

SOS provides semiconductor chiller solutions.
Tailored solutions for CO2 and F-gas-free temperature controllers.
Check your machines and replace them with our attractive offer.
We organize full substitution for dual channel coolers.
SOS realized and implemented chiller replacements for multiple platforms        and toolsets, such as 
• Lam Research - Dry-etch
• AMAT 5x00 equipment
• Novellus CVD

The HRZF Serie in LOW GWP variant complies to the new legislation.