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Dollars
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Lam 839-014757-067 Weldment, Gas Feed Line, Flex
00500003 / POWER SUPPLY SX502S-5KV-NEG-DC-AIR-1370 AXCELIS FUSION PS3 / LAMBDA
Lam Research 853-012566-001 Assy Shuttle Spatule
Lam Research, LAM 9400 ESC O/R KIT
Lam Research 765-008372-001 Encoder, Shaft
Oriental Stepping Motor VEXTA PH265M-31, Lam 853-015753-001
Lam Research 853-011168-002 Gap Driver Motor Protector An Breakout
Lam Research 716-011009-001, Window, Quartz EPD
Lam Research 768-090455-001 Switch, Vacuum 1/4VCR, 31 TORR A
Lam Research 810-017002-001 PCB I/O BREAKOUT BD
Lam Research 715-038532-002 Baffle Lower of Three
Lam Research 810-017031-004 ADIO Board
Lam Research 716-011624-005 Ring, Insulator, Lower Electrode, RDCD HGT
Lam Research 716-140236-062 Ring, Confinement Quartz
Lam Research 715-007025-001 Electrode Aluminum Anodized
Lam Research 768-000748-001, Switch Pressure Set 80PSI
Lam Research 853-004063-003, Assy Stop Post -6'
Lam Research 715-011626-001, Ring Cooling Lower Electrode
Lam Research 715-018906-002 Electrode Bottom Bellow
Ceramic Clamp Plate 6"