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LAM 715-018991-206, ELECTRODE ELCTD, ALUM, ANDZ, 6"
LAM 718-094756-061, ESC ELCTD, UPR, 6" ESC, MJR FLAT
LAM 713-000038-001, COVER LEXAN LOAD LOCK
LAM 766-002089-002, VALVE-ISOLATION DRIVE 4-WAY 24V
LAM 810-000503-003, PCB MATCH INTERFACE
LAM 713-013464-497, COVER SAFETY APM BOWL
LAM 853-020936-003, ASSY, UPPER SEAL PLATE, POLY
LAM 715-011204-001, CHAMBER EXIT LOADLOCK HOUSING incl topplate180 DEG
LAM 716-020904-018 CERAMIC RING, EDGE FOCUS, LWR WAFER CLAM
LAM 716-331051-002 R,UNIFTY,CUT-OUT,AS-FIRED
LAM 715-249333-001 PLATE MID ESC 9500 ASIQ/384T
LAM 716-331051-006 CERAMIC UNIFORMITY RING SHORT
LAM 716-330045-281, RING EDGE NON LANDED 8'' NOTCH
LAM 716-330167-288, RING, CLAMP, BOTTOM ACTUATOR
LAM 715-011753-001, PLATE UPPER BAFFLE
LAM 715-011913-080, PLATE LOWER BAFFLE
LAM RESEARCH 853-190023-001 DRIVE, HARD DISK, Controller
LAM 853-032908-608 VALVE ASSY, ISO ANGLE VALVE 1 1/2 HT
LAM 853-023538-001 HEATSINK VACUUM LINE
LAM 810-017038-002 PCB SERIAL I/O-2