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LAM RESEARCH 716-011638-006, CERAMIC RING, FOCUS, THIN EDGE, 6"
LAM RESEARCH 853-025054-126, PCB, ASSY, ESC POWER SUPPLY
LAM 853-190364-001 CABLE ASSY, CA, INTFC, HGP CONT, 4520XL
LAM RESEARCH 853-017411-004, CABLE ASSY, HARN, RF BOX GAP CNTRL
LAM RESEARCH 839-011886-001, WELDMENT, GAS FEED LINE, 6" 4520
LAM RESEARCH 839-024498-100, WELDMENT, HE & VAC TUBE
LAM 715-031023-002, SPATULA, EXIT SIDE, 9600 SMIF
LAM 715-011051-001, FRAME CHAMBER WINDOW
LAM 716-160255-002, QUARTZ JAR, BELL, SLEEVE, 8.46, ISO ETCH
LAM 810-017031-002, PCB, ASSY ADIO-AO Control Board
LAM 853-492747-001, CABLE ASSY, CA, XDCR, PRESS., LL, ALLI 6
LAM 853-492743-001, CABLE ASSY, CA, LL PMP INTFC
LAM 715-140006-001, SEAL PLATE, SIDE, RIGHT, OUTER GATE
LAM 853-017435-001, ASSY BOX LIFTER FILTER/SENS
LAM 853-017340-002, RF UNIT RFRB ASSY RESISTOR BANK
LAM 715-011559-141, CLAMP RING 4" AL ANODISED 30 MICRON
LAM 716-006711-001, 5.50" DFP-2 UPPER ELECTRODE
LAM 715-018991-206, ELECTRODE ELCTD, ALUM, ANDZ, 6"
LAM 718-094756-061, ESC ELCTD, UPR, 6" ESC, MJR FLAT
LAM 713-000038-001, COVER LEXAN LOAD LOCK