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Sw,Vacuum,1/4 VCR 75+/-31 Torr, Wasco SV129-31W2A-X/6782
Bellows, Inner Gate, Rev.F
Assy Arm Housing, Red Height
Assy,PCB,Engenuity, Rev.E2, VME-LTNI-6U
Assy Wafer Holder Isotropic Etch 6''
Switch, Vacuum, 5 Torr Gauge, Precision Sensors PV48W-15
LAM RESEARCH 810-707022-001 Assy, PCB, Gas Box Expansion, Rev.B
CYL, PNEU. DBL ACT. 3/4 BORE
Filter Element - 40 Micron, Lot of 2
ASSY,4520XLPH2,H/I,POSLOGI, Rev.D
FLTR,MILPRE,1/4"BOSS-1/4"VCR, WGFG01RH2
Element Water Filter, Lot of 5
LAM RESEARCH 810-494010-001 Assy,PCB,A6 Gasbox I/O & Intlk, Rev.B
Scr Flathead 10-32 KEL-F, Lot of 6
LAM RESEARCH 810-492560-001 Assy, Convectron PCB 1000T/640A
LAM 790-008072-001 24V DC Electro Motor, Inertia 1704-2511, Rev.A
Ring Confinement Vespel
Particle Filter, Size: 364*484*71 mm / 125 Pa / 99,995 %
LAM RESEARCH 810-492161-001 Assy PCB Multiplexer Transceiver
Screw Vespel, 8-32x.78