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0100-09123 AMAT Applied Materials / WAFER SENSOR BOARD
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AMAT Applied Materials 0190-09009 Phase Angle Controller, P1038, S4019
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Lam Research 853-370600-001 Cable Assy Moving RT1A
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AMAT 0010-09263 ASSY, PNEUMATIC MANIFOLD BASIC, AMAT 0100-09008, 104193
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LAM Research 714-220929-001 SIGNAL INTERFACE BOX, TURBO ISO-VALVE AC POWER
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STD MB-10 PN 2470 Versal Logic Eugene, Oregon
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Lam Research 716-011830-006, Ring Focus 6" (Alumina) W/C
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AMAT APPLIED MATERIALS 0010-09316 TEMP CONT ASSY CLOSED LOOP,TEOS
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Brooks 1358 1358E1D1EA1A1A Flow Meter Sho-Rate Flow Meter
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Varian Kestrel 650/750 E11094821 Shuttle Pick Assy, Tapered, 200mm, left
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Varian Kestrel 650/750 E17188420 Spoon 200mm
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Varian Kestrel 650/750 E17191530 Arm, Shuttle Pick
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LAM Research 856-510382-001, KIT RTRFT, VAC SW CABLING
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Axcelis 019296-03 PCB MCU-II Control Board
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Lam Research 715-018611-117 Cap, Lower, Electrode, 8" Chuck
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Lam Research 853-220458-001, Cable Assy
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LAM Research 715-330984-001 CHUCK GAS INJ FXD GAP BOTTOM RING
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Lam Research 713-011803-002, Ring, Electrode Clamp
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Applied Materials 0040-49556 Cover, Pre-Clean/Cool Down Monolith
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Lam Research 715-140286-001, Ring, Focus, 6", 4420
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