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LAM RESEARCH 716-140141-261, RING, HOT EDGE, 15DEG J-J 6"
LAM RESEARCH 716-011543-001, CERAMIC PLATE, W/C ATTACHMENT ("C" = .7)
LAM RESEARCH 716-011543-001, CERAMIC PLATE, W/C ATTACHMENT ("C" = .7)
LAM RESEARCH 853-013542-002, ASSY, ISOLATION VALVE
LAM RESEARCH 716-140432-061, RING, UPR, KEYED, 6 INCH
LAM RESEARCH 716-020904-018, CERAMIC RING, EDGE FOCUS, LWR WAFER CLAM
LAM RESEARCH 716-011638-006, CERAMIC RING, FOCUS, THIN EDGE, 6"
LAM RESEARCH 853-025054-126, PCB, ASSY, ESC POWER SUPPLY
LAM 853-190364-001 CABLE ASSY, CA, INTFC, HGP CONT, 4520XL
LAM RESEARCH 839-011886-001, WELDMENT, GAS FEED LINE, 6" 4520
LAM RESEARCH 839-024498-100, WELDMENT, HE & VAC TUBE
LAM 715-031023-002, SPATULA, EXIT SIDE, 9600 SMIF
LAM 715-011051-001, FRAME CHAMBER WINDOW
LAM 716-160255-002, QUARTZ JAR, BELL, SLEEVE, 8.46, ISO ETCH
END EFFECTOR 001-4967-09 BROOKS AUTOMATION 200MM
LAM 853-492747-001, CABLE ASSY, CA, XDCR, PRESS., LL, ALLI 6
LAM 853-492743-001, CABLE ASSY, CA, LL PMP INTFC
LAM 715-140006-001, SEAL PLATE, SIDE, RIGHT, OUTER GATE
LAM RESEARCH 853-017435-001, ASSY BOX LIFTER FILTER/SENS
LAM 714-013122-002 / 605-016005-002 / 605-016006-002 PCB BRACKET ASSY, VIDEO AND COMMS BOARD CLASSIC RAINBOW