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LAM Research 716-140118-001 Ring Focus ESC 8"
LAM Research 796-009861-016 Valve, Check 16PSI
ASSY Wafer Sensor Exit
LAM Research 715-028552-001 RING CLAMP UPPER ELECTRODE
LAM Research 715-140153-003 RING,CPLG,LVLG,EXP,ESC 8"STD
LAM Research 716-140069-002 PLT UPR INSUL TR 6"ESC
LAM Research 713-028553-103 Ring Confinement VESPEL
ASSY VAC BLK FRU
Electrode Silicon HI Temp Polish 8"
Lower Baffle Plate, Rev.A
LAM Research 715-140124-001 BAF,4528, UPR TPL SET, Rev.A
Lftr, Wfr 4-Pin Flex, No. 715-011622-101/A 2367 (part of assy)
LAM 853-011661-001ASSY LIFTER CYLINDER
Omron C28H-C6DR-DE-V1 (C28HC6DRDEV1) 24VDC
Ring, Retaining
Screen Window, Lot of 2
Manifold, 8S-L-A7-W-S-1
FSI Polaris 3500 Internal Unit, w/294146-401
FSI Polaris 3500, Macrolink 330138 & 330139, Panel and Cables
FSI Polaris 3500, Robot Power Switch Unit, Rev.B