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Hitachi M712 300mm wafer transfer robot with end effector and controllers
Festo DNGZK-50-100-PPV-A-S3 cylinder pmax. 12 bar
SMC CQSB25-90DC compact cylinder * Z-3862
LAM Reseach 716-011580-246 Plate Wafer Clamp 4"Alum
Lam Research 716-011580-141 VESPEL Plate Wafer Clamp 4"
LAM Research 716-140118-001 Ring Focus ESC 8"
LAM Research 796-009861-016 Valve, Check 16PSI
ASSY Wafer Sensor Exit
LAM Research 715-028552-001 RING CLAMP UPPER ELECTRODE
LAM Research 715-140153-003 RING,CPLG,LVLG,EXP,ESC 8"STD
LAM Research 716-140069-002 PLT UPR INSUL TR 6"ESC
LAM Research 713-028553-103 Ring Confinement VESPEL
ASSY VAC BLK FRU
Electrode Silicon HI Temp Polish 8"
Lower Baffle Plate, Rev.A
LAM Research 715-140124-001 BAF,4528, UPR TPL SET, Rev.A
Lftr, Wfr 4-Pin Flex, No. 715-011622-101/A 2367 (part of assy)
LAM 853-011661-001ASSY LIFTER CYLINDER
Omron C28H-C6DR-DE-V1 (C28HC6DRDEV1) 24VDC
Ring, Retaining