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LAM 853-002751-002-M ASSY POWER SUPPLY 50Hz 25-18
Assy Gate & Linkage-Inner Door, 853-001198-002, Refurbished
Assy Gate & Linkage-Outer Door, 853-001198-001, Refurbished
Automatch Controller
CHAMBER BODY
REMOTE CONTROL, NO. 852-017751-002-1, USED
8500N AC Axial Fan, 115V, Square, 50/60Hz (959-9754)
VME MODULE B32-BIT SINGLE BOARD MICROCOMPUTER, NO. 01-W3465B01, , USED
WAFER BOWL (BROKEN PIN AT BACK END)
WAFER BOWL, ST260, 12887-507
WAFER BOWL, ST260, 12887-507
RING, DIAMETER 34,9 CM, NO. 8477-0003, NEW OEM
PCB, Serial I/O, 392 A, 810-392-1-D-4055053
PCB, Ground Fault Interlock, Rev.A
LAM 810-017082-001 16 Channel Heat/Cool Bd., Rev.B, 810-017082-001
Convectron Tube Interface Bd., Rev.B
PCB, Solenoid Interlock Board, 810-017004-004, Rev.B
Solenoid Interlock Bd., Rev.D, 710-17004-1
PCB, USED, REV A
Stepper Motor Driver Board, Rev.E