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Plate, Shield Outer Ring (1 of 2), Quartz APX300
TEL/Tokyo Electron RE5L10-300693-11, Ring, Insulator 2mm A
TEL/Tokyo Electron RE5L10-200200-11, Ring, Focus 2mm A
TEL/Tokyo Electron RE5L10-100101-11, Gas Ring, Upper 135 HRZ
MRC D121114 Shield Ring HTR-150mm SS MXB TAB
Lam Research 716-011624-005 Ring, Insulator, Lower Electrode, RDCD HGT
Lam Research 716-140236-062 Ring, Confinement Quartz
Lam Research 715-011626-001, Ring Cooling Lower Electrode
Lam Research 715-030136-003 Ring, Hot Edge ESC, 6''
LAM Research 716-011763-008 CERAMIC RING, EDGE 8'', WAFER CLAMP
LAM Research 716-011763-008 CERAMIC RING, EDGE 8'', WAFER CLAMP
Lam Research 716-011830-006, Ring Focus 6" (Alumina) W/C
LAM Research 715-330984-001 CHUCK GAS INJ FXD GAP BOTTOM RING
Lam Research 713-011803-002, Ring, Electrode Clamp
Lam Research 715-140286-001, Ring, Focus, 6", 4420
Lam Research 715-140286-001, Ring, Focus, 6", 4420
LAM RESEARCH RING, HOT EDGE, HIGH WALL 716-140139-211
716-140236-003 / CONFINEMENT RING / LAM RESEARCH
716-140432-002 / UPPER RING GAS INLET / LAM RESEARCH
922-00632A LAM RESEARCH RING CONFINEMENT MODULAR QUARTZ