Assy,Htd Pdl,Plsh&Pltd,Hdwr,5"

https://solutions-on-silicon.com/web/image/product.template/65056/image_1920?unique=21f372f

Tested and functional.
Measured 60 Ohms resistance in heatcoil of the paddle.

    This combination does not exist.

    OEM: Lam Research
    Condition : Used

    Material number : 853-347147-005

    Condition code : USED

    OEM : Lam Research