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Aperture, Source HSG, Rev.B

https://solutions-on-silicon.com/web/image/product.template/30762/image_1920?unique=e5b5bd6

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    OEM: Axcelis
    Condition : New

    Material number : 0295-0091-0001

    Original Packaged : True

    Condition code : NEW OEM

    Tool : 8250 Implanter

    OEM : Axcelis