SoS owned spare parts AMAT 300mm Epitaxy Centura

THE LIST OF PARTS BELOW IS BASED UPON THE FREEZE DATE OF APRIL 1ST, 2017. ANY MUTATIONS SINCE ARE NOT REFRESHED IN THE LIST BELOW.

OEM_pn DESCRIPTION

223B-24179 BARATRON 500 TORR MKS
3930-00256 POWER BOX
0190-27649 CONNECT PORT TS4
0090-04412 ASSY
0190-25870 MICRONODEMKS I/O
0090-02287 LAMP FAIL PCB
0010-34991/ 0041-10987 LAMP UNITS
0040-41891 BASE PLATE 300911A-289
0040-78351 BASE PLATE 300911A-339
0040-78514  BASE PLATE 300911A-059
0020-04690  BASE PLATE 300911A-299
0020-86907  PLATE
0041-12864 01 BASE PLATE 300911A-459
0090-02622 SWITCH ASSY 250 PSI ADJUSTMENT 1/8 NPT 250V 15A
0040-07443  ELEVATOR ASSY S/N:119423-348
0150-76647 EMO JUMPERS LONG
628A-14984 BARATRON MKS 1000 TORR
0090-05409 ELEC. ASSY, CARR. IN SWLL SENSOR INTER. NEON SYS.
0010-34857  ADJUTSMENT TOOL
3880-01249 WSHR FLAT M4 4.3 ID X 9 OD X .8 THK SST
3880-01248 WSHR LKG SPLIT M4 7.6MMO DX4.1MMIDX.9MMT
3700-03403 O-RING ID.146 CSD .031 BUNA-N 70 DURO
0200-08307 WAFER LIFTER PIN SOLID SIC LED
0090-35002 ASSY, MAGNETIC SWITCH
0190-23114 SOLENOID MANIFOLD 7 SOL
0190-28951  CONTROL VIDEO SWITCH
3870-05756 VALVE MANUAL HAMLET
1350-00492 PRESSURE TRANSDUCER SETRA
1350-00490 PRESSURE TRANSDUCER SETRA 1/4 VCR
3800-00462 PARKER PRESSURE REGULATOR
3800-00424 HORIBASTEC 5SLM 0~300KPA
6408-29126 pressure controller type 640 mks
0200-08207  QUARTZ GRIPPER ARM BREEKBAAR
0041-01104  DOOR PNEUMATIC CYLINDER AMAT PARKER
0040-96267  LID SWLA CENTER DIFFUSER
0190-27880 MFC N2 AERA PI-980 MGMR 10000 SCCM INCL IN AND OUTLET VALVES
0190-34218 MFC N2 AERA PI-98 MGMR 50000 SCCM INCL IN AND OUTLET VALVES
0190-27882 MFC N2 AERA PI-98 MGMR 51000 SCCM INCL IN AND OUTLET VALVES
0190-34216 MFC N2 AERA PI-980 MGMR 10000 SCCM INCL IN AND OUTLET VALVES EXTRA VALVES
0190-27881 MFC N2 AERA PI-980 MGMR 30000 SCCM INCL IN AND OUTLET VALVESAND EXTRA VALVES AND GASLINES
0190-27882 MFC N2 AERA PI-980 MGMR 39000 SCCM INCL IN AND OUTLET VALVES AND EXTRA GASLINES
0190-34216 MFC N2 AERA PI-980 MGMR 10000 SCCM INCL IN AND OUTLET VALVES AND EXTRA VALVES AND GASLINES
0190-27878 MFC N2 AERA PI-980 MGMR 1000 SCCM INCL IN AND OUTLET VALVES
0190-27877 MFC N2 AERA PI-980 MGMR 300 SCCM INCL IN AND OUTLET VALVES
0190-34214 MFC N2 AERA PI-98 MGMR 1000 SCCM INCL IN AND OUTLET VALVES
0190-34215 MFC N2 AERA PI-98 MGMR 2000 SCCM INCL IN AND OUTLET VALVES WITH EXTRA HAND VALVES
0190-34212 MFC N2 AERA PI-98 MGMR 100 SCCM INCL IN AND OUTLET VALVES
0190-34212 MFC N2 AERA PI-98 MGMR 32 SCCM INCL IN AND OUTLET VALVES
0190-34218 MFC ASSY MFC N2 AERA PI-98 MGMR 51000 SCCM INCL IN AND OUTLET VALVE
0190-27878 MFC N2 AERA PI-98 MGMR 1000 SCCM INCL IN AND OUTLET VALVES AND EXTRA HANDVALVES
0190-34216 MFC N2 AERA PI-98 MGMR 10000 SCCM INCL IN AND OUTLET VALVES AND EXTRA HAND VALVES
0190-27882 MFC N2 AERA PI-98 MGMR 51000 SCCM INCL IN AND OUTLET VALVES AND EXTRA GASLINES
0190-27878 MFC N2 AERA PI-980 1000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES
0190-34216 MFC N2 AERA PI-98 3000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES
0190-27878 MFC N2 AERA PI-980 1000 SCCM INCL IN AND OUTLET VALVES
0190-27882 MFC ASSY MFC N2 AERA PI-980 51000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES
0190-27882 MFC N2 AERA PI-980 51000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES AND GASLINES
0190-34216 MFC ASSY MFC N2 AERA PI-98 10000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES AND GASLINES
0190-27881 MFC ASSY MFC N2 AERA PI-980 39000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES
0190-27876 MFC N2 AERA PI-980 100 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES AND GASLINES
0190-27878 MFC N2 AERA PI-980 1000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES AND GASLINES
0190-34218 MFC N2 AERA PI-980 51000 SCCM INCL IN AND OUTLET VALVES AND HANDVALVES
0010-45649 INTER GASLINE PURGE PALLET SURFACE MOUNT 10 POS STANDARD LED
0190-30906 DRY PUMP TOYOTA IPUP T100L 3PH 208V 12A 50/60hZ
0190-17464 Lamp Driver Dimmer SCR Control MODEL P1191D
0010-42053 robot transfer chamber
0021-46745 Gold reflector 
0021-46745  Gold reflector 
0021-46745  Gold reflector 
0041-10718  Gold reflector 
0041-10718  Gold reflector 
0041-10718  Gold reflector 
0021-46909  Gold reflector 
0021-46909  Gold reflector 
0041-09756  Gold reflector 
0041-09756  Gold reflector 
0041-10100  Gold reflector 
0041-10100  Gold reflector 
0041-10100  Gold reflector 
0041-12398  Gold reflector 
0041-12398  Gold reflector 
0041-12398  Gold reflector 
0021-46747  Gold reflector 
0021-46747  Gold reflector 
0021-46747  Gold reflector 
0041-13105  Gold reflector